As the semiconductor industry continues on its inexorable path to classic transistor “shrink,” as predicted by Gordon Moore in his “Moore’s Law,” it has collided with the reality that while process shrinks are possible, they… Continue reading Increasing Performance of High-Volume Advanced Semiconductor Manufacturing Equipment
In order to improve throughput in semiconductor process tools, one must first consider the stepwise nature of the specific processes involved. Often the semiconductor wafer must be conveyed from process chamber to process chamber with… Continue reading Optimizing Semiconductor Wafer Handling and Robotics for Maximum Production Efficiency
Since the adoption of new process nodes has been significantly slowed down due to availability and cost of next generation FEOL lithography technologies, it is ever more important that the continuation of cost reductions and… Continue reading Lowering Cost of Ownership (COO): “Track” Tools in Back end of the Line (BEOL) Thick Resist Film processes
