The FotoFab is a manually loaded system with automated process steps allowing for production worthy repeatability in a manually loaded system. A system for both scholastic and light industrial users, where a full scale industrial process needs to be emulated or developed. The system comes complete with fully automated, programmable and integrated dispensers, programmable oscillating dispense arms, spin bowl exhaust level, hot plate and cold plate; even the vacuum pump for the chuck is included. The user simply plugs the system in and provides facility exhaust. In this low-cost system the capability of multi million dollar systems comes included. “Just what you need”, nothing more but nothing less either.
This semi automated, multiple wafer size system, provides the coating capabilities of a fully automated HVM system in a semi-automatic, manually loaded system with a small footprint. The system provides automated process parameter control and is capable of producing all of the capabilities of the worlds most expensive and sophisticated tools.
The Cyclone is a manually loaded etch and clean tool that can be adapted to multiple dispense techniques including a high pressure spray, megasonic, ultrasonic, and agitation.
The Cyclone allows for all the process capabilities of a fully automated spin etcher and cleaner, in a manually loaded tool.