In order to improve throughput in semiconductor process tools, one must first consider the stepwise nature of the specific processes involved. Often the semiconductor wafer must be conveyed from process chamber to process chamber with… Continue reading Optimizing Semiconductor Wafer Handling and Robotics for Maximum Production Efficiency
In earlier writings we have discussed cost of ownership issues (COO) related to photoresist processing tools. In this entry, we will discuss the important functional differences between tools generally intended for the FEOL, and those… Continue reading Why Back End of Line (BEOL) Photoresist “Track” Tools Are & Must Be Different from Front End of Line (FEOL) Photoresist Processors
In our last article, we discussed the need to lower the COO of the tools of production for those who are both designing and building their chips. The issue that we attempt to address here is… Continue reading Lowering the Cost of Ownership (COO) of Spin Process Tools
