In order to improve throughput in semiconductor process tools, one must first consider the stepwise nature of the specific processes involved. Often the semiconductor wafer must be conveyed from process chamber to process chamber with… Continue reading Optimizing Semiconductor Wafer Handling and Robotics for Maximum Production Efficiency
In the past we’ve discussed “Lowering the Cost of Ownership (COO) of Spin Process Tools.” but we did not discuss the fact that the customer does have an option to purchase a used, “used and… Continue reading New vs Refurbished Used Photoresist Process Equipment: Challenges & Benefits
In earlier writings we have discussed cost of ownership issues (COO) related to photoresist processing tools. In this entry, we will discuss the important functional differences between tools generally intended for the FEOL, and those… Continue reading Why Back End of Line (BEOL) Photoresist “Track” Tools Are & Must Be Different from Front End of Line (FEOL) Photoresist Processors
