S-Cubed wafer processing systems reflect our philosophy of advanced process performance using a field proven modular architecture. The Scene Architecture handles wafers up to 300 mm while providing more capability in less space at lower cost than any system from any manufacturer world-wide.
The Scene Architecture takes wafer processing to it’s fullest potential with more stacked processes, higher reliability, and lower maintenance requirements than ever before, while keeping overall footprint low.
Extreme accuracy and reliability are the legacy of all our wafer processing machines. Our modular architecture means you get exactly the machine you need, not the premade machine you are forced to buy.
The S-Cubed LOR processor is designed to perform both LOR and photoresist patterning processes automatically and sequentially using both high pressure dispense of solvents, and/or immersed and heated “soaks”
A Flexible implementation of WEE that can be combined with coat and/or develop modules. Highly integrated for maximum BEOL processing in a small footprint.
For creation of solder balls and pillars, our Scene Architecture based reflow machine can perform wafer scale reflow for flux (apply & clean) and fluxless processes.
The Scene architecture is specifically designed to offer the lowest overall cost of ownership in the industry. All without sacrificing reliability, performance or longevity.
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