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S-Cubed Offers Configurable Systems

All S-Cubed Tools uses field proven modules arranged in process driven configurations. In this way, S-Cubed equipment represents mature engineering design, while retaining maximum flexibility for customer processes.

The primary difference between the Scene and Flexi architecture based tools has to do the capabilities of the wafer handling robots. The SCENE architecture is our most advanced robot using full cartesian plane movement with a polar robot capability that can be extended to handle more modules and produce higher wafer throughput for production environments. 

The Flexi series offers a fixed polar coordinate robot, which still allows tremendous wafer handling flexibility but in a smaller footprint. This principle difference permits far more addressable functions in Scene series while the Flexi can be both simpler and smaller. 

Our S-Cubed basics are fully automated, manually loaded process tools, affordable, and ideal for academic and laboratory environments.

Processes include: Prime, Chill, Coat, Bake, PEB, WEE, Develop – with up to 50, 300mm wafers on the tool. This is a production work horse that can do it all.
Our Wafer Edge Processing provides concentricity within .75mm, handling wafer sizes to 300mm, with flat following & patterns.
A small footprint photoresist designed for light production with radial robot access and stacked modules for up to 200mm wafer processing.
For your lab or research facility these value oriented machines replicate high cost lithography processesin smaller, less expensive footprints.

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