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The Photolithography Process and Its Use In Wafer Level Chip Scale Packing (WLCSP)

The basic concept of Wafer Level Chip Scale Packaging (WLCSP) is to employ more or less the same techniques used in making a semiconductor device to create its packaged form. For convenience we will define… Continue reading The Photolithography Process and Its Use In Wafer Level Chip Scale Packing (WLCSP)

Lowering Cost of Ownership (COO) “Track” Tools in Back end of the Line (BEOL) Thick Resist Film processes

As it becomes apparent that the adoption of new process nodes has been significantly slowed down due to availability and cost of next generation FEOL lithography technologies, it becomes ever more important that the continuation… Continue reading Lowering Cost of Ownership (COO) “Track” Tools in Back end of the Line (BEOL) Thick Resist Film processes

Creating Value With “Track” Tools in Back end of the Line (BEOL)

The Semiconductor Industry has for years followed the path of “Moore’s” Law. Gordon Moore’s forecast that the industry would every 18 months double the number of transistors in a given area, thereby increasing value while… Continue reading Creating Value With “Track” Tools in Back end of the Line (BEOL)

Why Back End of Line (BEOL) Photoresist “Track” Tools are and must be Different from Front End of Line (FEOL) Photoresist Processors

In earlier writings we have discussed cost of ownership issues (COO) related to photoresist processing tools. In this entry, we will discuss the important functional differences between tools generally intended for the FEOL, and those… Continue reading Why Back End of Line (BEOL) Photoresist “Track” Tools are and must be Different from Front End of Line (FEOL) Photoresist Processors

System Granularity and Management of Change and Growth

A very important aspect of cost of ownership (COO) of tools that include spin coaters and developers (often referred to a photoresist track tools) in the back end of line (BEOL), MEMS, and patterned sapphire… Continue reading System Granularity and Management of Change and Growth

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