June 2011
New S-Cubed “Force 300″ Photoresist Processing Tool Lowers Cost of Ownership
S-Cubed has delivered the latest version of its Force 300 which features some distinct advantages over other photoresist tools. The new Force 300 features a high speed dual end effector robot with a unique built in positioning system that enables higher tool throughput by virtually eliminating wafer location uncertainty.
A single robot can service a multitude of processes and FOUPs and/or cassette stations. Swap time for the robot at a process zone approximates 3 seconds enabling process modules to be in near continuous operation boosting tool throughput.
The tool is capable of all of the photoresist processes including Prime, Chill, Coat, Bake, Develop and WEE in any user programmable order desired. The new Force 300 is available in “fine grained” module counts to match module throughput minimizing foot print and tool complexity.
The S-Cubed Engineering team is comprised of accomplished engineers and entrepreneurs with a long history of designing and manufacturing innovative equipment for the semiconductor and allied industries. S-Cubed provides higher reliability, more functionality and a smaller footprint – all at a lower cost, by eliminating “non value added” hardware and by the use of advanced controls, software and robotics.
October 2010
PRC6625™ Back Side Reticle Cleaner
The PRC 6625 tm (patent pending) provides a means of cleaning the back side of a Pellicilized Reticle without affecting nor even touching the Pellicilized side of the reticle. The specially designed handling means coupled with an innovative capture chuck enables the cleaning of the back to remove unwanted haze and particles.
The tool typically handles the reticles from a SMIF pod and returns the cleaned reticle to the SMIF pod. The use of the S-Cubed PRC 6625 will substantially reduce reticle set costs by providing means for a fab to clean their reticles without having to resort to sending the reticles out for pellicle demount, clean and remount.
September 2010
Dual robot load module
S-Cubed has begun shipping tools with Dual Robot load modules. In instances when the availability of the central handling robot is the limiting factor in throughput or process capability a second robot is provided. When the second robot is used the cassette platens are “stacked”.
August 2010
New colleagues are appointed
Mark List a graduate of NJIT in Mechanical Engineering has joined the company. Mark is responsible for both creating new designs and sustaining the S-Cubed “library of skills”.
Simon Lee, a recent graduate of Rutgers in Mechanical Engineering has joined S-Cubed. Simon is currently undergoing training with a view to being the principal liaison with both Taylor and customers in Taiwan and Mainland China. Simon, a US citizen, was born in China and in addition to being a trained engineer is fluent in both Mandarin and English.
