Semiconductor Photoresist, And Cleaning Process Tools

Flexi

Photoresist Spin Processing Systems

flexi-iiiS-Cubed offers long proven process capability in combination with the most up to date control and software capabilities.

Excellent Process Control

Spin axis is always within one revolution in absolute terms of programmed velocity and trajectory ± 1% temperature uniformity for thermal modules High Reliability Demonstrated greater than 1000 hrs MTBF Small Size Typical system with two spins, four thermals and two cassettes 1 Meter^2 Granular Modularity Get what you need when and as you need it Low Cost of Ownership Fewer parts for lower cost and improved reliability occupying less spaceAll process actuations are servo motor driven and programmable

flexi-datasheet

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