Photoresist Spin Processing Systems
S-Cubed offers long proven process capability in combination with the most up to date control and software capabilities.
Excellent Process Control
Spin axis is always within one revolution in absolute terms of programmed velocity and trajectory ± 1% temperature uniformity for thermal modules
High Reliability
Demonstrated greater than 1000 hrs MTBF
Small Size
Typical system with two spins, four thermals and two cassettes 1 Meter^2
Granular Modularity
Get what you need when and as you need it
Low Cost of Ownership
Fewer parts for lower cost and improved reliability occupying less space
All process actuations are servo motor driven and programmable
Flexi Photoresist Processing System from S-Cubed on Vimeo.
