S-Cubed offers long proven process capability in combination with the most up to date control and software capabilities.
Excellent Process Control
Spin axis is always within one revolution in absolute terms of programmed velocity and trajectory
± 1% temperature uniformity for thermal modules
High Reliability
Demonstrated greater than 1000 hrs MTBF
Small Size
Typical system with two spins, two thermals and two cassettes 1 Meter2
Granular Modularity
Get what you need when and as you need it
Low Cost of Ownership
Fewer parts for lower cost and improved reliability occupying less space
- 2 thermal modules
- 1 dispense per dispense arm, two dispense arms
- Adjustable dispense height
All Process actuations are pneumatic and adjustable (not programmable)
For more information about the Flexi IV Photoresist Preprocessing Systems, please complete the convenient contact form.
