S-Cubed Products and Services

Flexi-PCS™
PC Based Flexi Track Systems
Photoresist Processing Systems
(info) (video)

(Dispense Options)

General Products
Brochure
> HERE <

Dispense Options
(info)

Products and Services

Flexi-PCS™
Photoresist Processing Systems
Flexi-PCSis a value-engineered solution to your requirements for photoresist and thermal-processing equipment that combines extended functionality, high reliability, high throughput and process control with small footprint and low cost.

Standard and available functions of the Flexi-PCSare:

Stacked thermal modules

HMDS Prime
Precision Hot plate to 250C with controlled ambient
Precision Hot Plate to 450C with controlled ambient
Chill plate

Coat Module with 4 dispense of photo resist, one solvent EBR
Non-contact optical centering
Dispense tip solvent ambient
Develop Module with 2 spray dispense and two streaming dispense
Cassette Module with "Flip" capability for double sided applications
Optical Edge Expose Module
Robotic handler subsystem

Please review the literature for a more complete description of these standard modules. S-Cubed would be happy to quote your requirements for modules specialized to your application.
(see demo video)

FotoFab™
Value Engineered Photoresist Processing Systems
FotoFab..."Just What You Need", complete photolithographic process capability in a simple, easily maintained, cost effective package!

The FotoFab process system is a full solution to the problem of precision spin coating in both Research and Development applications and Production Applications. The system is available as a manual load system, or a mechanized system.

The system couples high reliability with low cost by employing an integrated system concept at the most fundamental level. A single mounting plate is the base for the spinner module and thermal modules. Reliable and rugged pneumatic actuators are used to move the dispense arms, centering device and process chamber cover.

The cost of ownership is further reduced by the use of a disposable spin cup, eliminating the need for costly cleanups while providing both production and R&D applications with a clean process ambient at very low cost. (brochure)

TruClean™
Double Sided Brush Scrubbers
Our new TruClean™ Double Sided Scrub System is now available for wafers up to 300mm and rectilinear materials from 38mm up to 300mm square. These small footprint systems are available in manual load/unload arrangements or for cassette-to-cassette operation. Options include wet input, megasonic rinses and multiple brush capabilities.

New brush scrub modules are available for inclusion in OEM cleaning systems. These 4-brush modules are available with and without electronics and can be configured for specific system requirements. Current modules are available for wafers and rectilinear materials from as small as a business card up to 300 mm.S³ will incorporate single or multiple modules into a complete system including materials handling and other options on request. Please contact the factory for more information and to discuss your particular cleaning needs. (brochure or demo video)

Cyclone™
Single Wafer Chemical Processors
The Cyclone 300/HP/M-CB High Pressure IPA Frame-Mounted Wafer Clean system.

Stand-Alone Hot Plates
The Model SHP400 is a self sufficient, stand-alone 400°C capable hot plate for baking wafers up to 200mm.

The Model SHP450 is a self sufficient, stand-alone 450°C capable hot plate for baking wafers up to 300mm.

> General Products Brochure HERE <

FotoFab™
Value Engineered Photoresist Processing System
(info)

Cyclone™
High Pressure IPA
Frame-Mounted
Wafer Clean
(info) (video)

Flexi-PCS™
Optical Edge Exposure System
(info) (video)

Model SHP400
400°C
Stand-Alone
Hot Plate
(info)

Model SHP450
300 MM
Stand-Alone
Hot Plate
(info)

Services

Service and Repairs
Our service organization provides field service for MTI equipment around the world. Service contracts are available as well as telephone service support and training classes. Customer systems can be completely rebuilt as required. Reconfigurations, size conversions, installs and de-installs can be performed. All printed circuit boards can be repaired as well as many other components including most spin motors, power supplies and other items. Please call, fax or e-mail for assistance.

Spare Parts for MTI Photoresist Processing Systems
S-Cubed offers spare parts support for FlexiFab and MultiFab. Most parts for other models can also be provided including the TargeTrack and OmniChuck.

Spare Parts for EATON (Axcelis) Photoresist Track Systems
By agreement with Eaton Corporation^® (Axcelis), S-Cubed offers spare parts support for Eaton made photoresist "track" systems including the 6000, 6000XL, LSI 45^™ and System 10^™.