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A Leading Supplier of Semiconductor Photoresist Process and Wafer Cleaning Equipment

Smart tools that maximize performance and lower cost of ownership

Applications
  • Patterned Sapphire Substrates
  • BEOL
  • MEMS
  • LED/OLED
  • III – V Telecom Materials
  • PV Photo Voltaics
  • Mask Cleaner


S-Cubed is a designer and manufacturer of advanced semiconductor photolithography systems. Our BEOL photoresist spin processing equipment includes the FLEXI system which performs COAT, DEVELOP, BAKE, and WEE in a programmable package that can have a lower total cost of ownership than used equipment.  

S-Cubed System Features

  • Ultra high reliability
  • Small footprint
  • Color LCD touchscreen
  • Unlimited process storage capabilities
  • Remote data collection and control
  • Stacked thermal modules
  • Multiple size substrates without change
  • Servo motion control
  • Process substrates up to 300 mm
  • Proven modular design
  • Lowest cost of ownership
  • Production worthy tools
 

For more information about semiconductor photoresist process and wafer edge equipment, contact S-Cubed today