A Leading Supplier of Photoresist Process and Cleaning Equipment

Smart tools that maximize performance and lower cost of ownership

Applications
  • Patterned Sapphire Substrates
  • BEOL
  • MEMS
  • LED/OLED
  • III – V Telecom Materials
  • PV Photo Voltaics
  • Mask Cleaner

S-Cubed System Features

  • Ultra high reliability
  • Small footprint
  • Color LCD touchscreen
  • Unlimited process storage capabilities
  • Remote data collection and control
  • Stacked thermal modules
  • Multiple size substrates without change
  • Servo motion control
  • Process substrates up to 300 mm
  • Proven modular design
  • Lowest cost of ownership
  • Production worthy tools

For more information about photoresist process and cleaning equipment, contact S-Cubed today