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S-Cubed (S³) Provides Value Engineered Process Systems to the Semiconductor and Allied Industries

The S-Cubed product offering includes:

• Flexi-PCS™ processors, for photoresist and similar applications in compound semiconductors, MEMS, packaging and more
• FotoFab™ processors, for precision spin coating in both R&D development and production applications
• Controlled environment (vacuum, oxygen free, etc.) hot plates and systems for up to 450ºC for both photolithographic and other processes requiring programmable and precise substrate heating
• Cyclone™ small footprint chemical processing systems, for manual / automatic cleaning or etching applications such as the High Pressure IPA Frame-Mounted Wafer Clean configuration
• TruClean™ systems using double-sided scrubbing (patented) and megasonic technology
• Other systems, for OLED handling (controlled ambient) and optical edge exposure
• Special purpose tools designed and built to solve customer problems, including bonding, fiber handling, servo control, image analysis, temperature control, power control, position control and robotics

S-Cubed offers long proven process capability in combination with the most up to date control and software capabilities. The introduction of the up to date control technology has also enabled a substantial reduction in cost, permitting S³ to offer new equipment at costs that often are lower than used or rebuilt equipment while offering superior process capability, reliability and new equipment warranty.

The patented TruClean™ double sided scrub module for wafers or rectilinear substrates up to 300 mm can be incorporated in a host of customer driven configurations. For example: wet in-dry out, dry in-dry out, stacked, with megasonic or ultra high-pressure enhancement, and multiple as well as single brush sets.  S-Cubed’s value engineered approach ensures high reliability and functionality in every instance.

How do value engineered systems provide higher reliability, more functionality and smaller footprint all at lower cost? We do it by eliminating "non value added" hardware by the use of advanced control hardware, software and robotics. One important example is the elimination of outdated mechanical wafer centering devices. On the Flexi-PCS™ the control intelligence uses a high-resolution camera to determine the position of the wafer with respect to the spin chuck, whereby the control intelligence directs the robotic loader to simply load the wafer to the center of the chuck. Not only is the cost reduced but also throughput and cleanliness are enhanced and the elimination of a complex subassembly in its entirety improves reliability. There are many such examples in the implementation of this combination of well proven technologies that has enabled S-Cubed to offer value engineered process systems.

The S-Cubed family of products has been created to utilize standard components ensuring that spares to support the products in the field are stocked and quickly available.

Click here for our latest General Products Brochure, or visit our Products & Services page to see what we can do for you!

By special agreement with Eaton Corporation^® (Axcelis), S³ offers complete parts support and repairs for all models of photoresist processing systems made by Eaton Corporation (Axcelis), including the 6000, 6000XL, LSI 45^™ and System 10^™.

FotoFab™
Value Engineered Photoresist Processing System
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Cyclone™
High Pressure IPA
Frame-Mounted
Wafer Clean
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Flexi-PCS™
Optical Edge Exposure System
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Model SHP400
400°C
Stand-Alone
Hot Plate
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Model SHP450
300 MM
Stand-Alone
Hot Plate
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