Smart tools that maximize performance and lower cost of ownership
Applications- Patterned Sapphire Substrates
- BEOL
- MEMS
- LED/OLED
- III – V Telecom Materials
- PV Photo Voltaics
- Mask Cleaner
S-Cubed System Features
- Ultra high reliability
- Small footprint
- Color LCD touchscreen
- Unlimited process storage capabilities
- Remote data collection and control
- Stacked thermal modules
- Multiple size substrates without change
- Servo motion control
- Process substrates up to 300 mm
- Proven modular design
- Lowest cost of ownership
- Production worthy tools
